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光子学报  2003 

A Compound Type of Sensor for Measuring Fluid Velocity
用于测量流体流速的复合式传感器

Keywords: Fluid,Current velocity,Pressure sensor
流体
,流速,压力传感器

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Abstract:

Based on the Pitot tube principle of measuring fluid velocity in hydromechanics, a kind of compound sensor (consisting of one pressure sensor, and one pressure difference sensor) of measuring fluid velocity is developed. In this paper the measuring principle of the new type of sensor,the structural design and manufacturing of the sensor and chips are presented, and the experimental results are listed. The fluid pressure and pressure difference can be displayed by this sensor at the same time, besides this sensor has intellectualized and is used in unmanned fluid observation station.

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