AMPLITUDE ANALYSIS OF OPTICALLY EXCITED SILICON MICRORESONATORS
光激励硅微机械谐振器的振幅分析及计算

The analysis and calculation of the amplitude is given to theoptically excitedsilicon microresonators which have or haven′t films,and a new model is built to the microresonator with films based on the heat conducting theory,the thermal strain theory and the mechanical vibration theory.The comparison between the theoretical values and experimental values shows that the new model is more accurate.