THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS
掺氮对类金刚石薄膜场发射的影响

The Diamond-Like Carbon (DLC) film and Nitrogen-doped DLC(N-DLC) film are deposited on molybdenum coated ceramic substrate by using the pulsed laser deposition technique. The microstructure and morphology of the films are examined using X-ray diffraction, Raman spectroscopy and scanning electron microscopy. Field emission measurements are carried out by using the diode structure. The field emission measurements indicate that nitrogen doping can lower the turn-on field and increase the current density.