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电子与信息学报 1999
MONTE CARLO SIMULATION OF ENERGY SPECTRUM AND SPACE CHARGE EFFECT OF MULTI-ENERGY ELECTRON BEAMS
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Abstract:
An approach to generate a multi-energy electron beam by transmitting a monoen-ergetic beam though a solid film is proposed. The energy (velocity) spectrum of the resultant beam is predicted by Monte Carlo simulation of electron scattering. The calculation accuracy is fairly good in comparison with available measurements. Space charge effect of a multi-energy electron beam in a uniform electrical field or field-free space has also been analyzed.