RESEARCH ON MICROWAVE PLASMA SOURCE
微波放电等离子体源的研究

Using the priciple of electron cyclotron resonance, the microwave plasma with high degree of ionization and activity is obtained under the lower pressure from 10-3 to 10-4 Pa. In this paper, the influences of the microwave input power and gas pressures on the parameters of plasma in nitrogen and argon are studied with Langmuir probe, and mass spectrographic analysis is also made.