SIMULATION OF MULTIPLE FRACTAL AND COMPACT GROWTH OF ULTRA-THIN FILMS ON HEXAGONAL SUBSTRATE

The multiple cluster growth of ultra-thin films with different deposition rate and different substrate temperature has been studied by kinetic Monte-Carlo simulation. With increasing diffusion rate along cluster edges (corresponding to an increasing substrate temperature), pattern structures change smoothly from fractal islands, compact islands with random shapes, to regular islands, and the average branch width of clusters increases continuously up to some constant value in the compact island limit. The formation of the multiple fractal and compact clusters can be described quantitatively by multifractal. The results of multifractal analysis show that with pattern change from fractal to compact islands, the Hausdorff dimension D0, the information dimension D1, and the correlation dimension D2 decrease, while the width and height of the multifractal spectra increase.