Amorphous Alloy Forming in the Fe-Hf Films by IBAD Technique

Amorphization in the Fe/Hf multilayered films was achieved by Ar+ ion beam assisted deposition (IBAD) technique. The Ar+ ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Hf-rich films and their compositions were located in a range of 50 similar to 80 at. pct Hf. The amorphization mechanism was also discussed.