Spatial Phase-shifting Method for Adaptive Vibration-resistant Interferometer
干涉仪自适应抗振的空间移相术

Based on the conception of the phase-shifting method in time domain, a new technique named spatial phase-shifting method is presented. It can detect the phase variation caused by fringe movement due to the external perturbations. This method is applied to a Twyman-Green phase shifting interferometer in which an adaptive vibration-resistant system has been built. In this interferometer, the fringe phase is calibrated in real time by a piezoelectric transducer (PZT) used as both phase-shifting and motional feedback device, thus fringe pattern is stabilized and the optical testing can be carried out.