Oxidation of Sputtered CoCrAl Microcrystalline Coating

1. Introduction High temperature oxidation resistanceof alloys depends on the formation of adense oxide scale with slow growing rateon its top surface. The α-Al_2O_3 films appearto be the oxide with the lowest growingrate. In the CoCrAl systems, the continuousα-Al_2O_3 can not be formed if the contentof aluminium in the alloy is less than severalhundredths. For the improvement ofoxidation resistance of MCrAl (M=Co,Ni and Fe), many studies have been conducted