QUALITY OF THE DIAMOND FILM AND ITS CHARATERIZATION
金刚石薄膜品质及其表征

In this paper, the effects of composition, structure, inclusion, especilly chemical and structural defects of diamond films on the thermal, electronic, optic, mechanic and chemical properties have been ex-pounded. The new progress of analysis and characterization methods for film guality has been introduced. It has been shown that the studing tendency of deeply develops toward the type and concentration distribution of defects, as well as doping and segregation.It is necessary to reseasch more perfect analytical method, in order to control quality of films, enchance the properties of films and develop new device. Authors suggest that under the condition of ensuring highest collectve emcience of' CL' (cathodoluminescence) in SEM-WDCL(cathodoluminescence Scanning Elec-tron Microanalysis Equipment), the original spstial resolution of SEM can not be reduced as much as possi-ble; On the basis of 'CL' spectra having high sensitivity for dopant, the ability of quantitative analysis should be perfected, at the same time, combining SEM-WDCL with digital image analysis technology, these infor-mation of the distribution statistics of defects doping and segreqation, and even the non-diamond canbon can be obtained.