Investigation on Defects in High-rate Magnetron Sputtered CoCr Coatings

Coatings obtained with magnetron sputtering exhibit a columnay structure. There are nodular defects distributed in the coatings, which are fomed by radial growth of columnay grains in groups. The fomation of them does not necessarily depend on surface asperities of substrate. The columnar grain boundaries are enriched in oxygen, which causes microporosity in the intercolumnar regions.