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光子学报  2001 

A NEW TWO DIMENSIONAL DETECTOR FOR X-RAY
一种新型二维X射线探测器

Keywords: X-ray detection,X-ray diagnosis,Nondestructive inspection
X射线探测器
,X射线诊断,无损探伤,真空微电子

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Abstract:

The paper proposes a new type of X ray detector that is a matrix addressing two dimensional device and consists of two glass substr ates called cathode substrate and anode substrate respectively.The cathode subst rate has X ray photocathode and column electrodes,the anode substrate has addre ssing electrodes and barrier walls.Two glass substrates are sealed together to m ake their electrodes mutually perpendicular first and then pumped to high vacuum .Following the pump,the device is filled with mixture of Ar and CO2.The detect or,in fact,is a matrix of micro gas-filled phototubes and therefore has some fe atures:no image distortion,high spatial resolution,more sensitive and easy to be manufactured in big size and large scale by PDP technology.

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