Texture of Magnetron Sputter-deposited 1Cr18Ni9Ti Stainless Steel

Phase transformation of magnetronsputter deposited 1Cr18Ni9Ti stainlesssteel has been studied 1]. A single bccphase was formed as the substrate tempera-ture kept below 370℃. The deposits exhibited different textures,which depended on the position of the subs-trates relative to the target: the predominant(110) planes were parallel to the surfaceof substrate which was parallel to the target:the predominance was weakened whenthe substrate surface was vertical to the