GROWTH PROCESS FOR DIAMOND THIN FILMS
化学汽相沉积金刚石薄膜的生长

High quality diamond thin films were grown by hot finament chchcal vopr dopsition.Their microstructure and growth processes were studied by means of high-magnification scatring clectron miorosoopy. The study showed that nucleation of diamond was detetrined mainly by the sharp degree of deposition sites. The growth of diamond thin films consisted of growth of primary diamond nuleus, second nucleation and their growth onto the diamond thin films, can be described by gradahonal growth. The growth processes of diamond particles consisted of the epitaxial growth stage and second nucleation and their growth stage, can also be decribed by gradational growth. Gradational growth leaded to larer up layer struc-ture of diamond particles and thin filIns because of second nucleation and their growth.