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材料研究学报 1997
OPTICAL PROPERTIES OF AMORPHOUS DIAMOND FILM
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Abstract:
Amorphous diamond film (a-D) were prepared by deposition from magnetic filtered ions sputtering from graphite. The optical absorption spectra of a-D film deposited in diffrent substrate bias voltage condition were investigated. Thickness and refractive index of film were ellipsometrically measured. It is found that absorption of samples mainly results from a state, Optical band gap is 3.1 -3.4eV and the a-Dfilm with high SP3 fraction can be grown when the bias voltage range from-50V to-20V.
