EFFECTS OF SUBSTRATE PRETREATMENT ON NUCLEATION AND GROWTH OF DIAMOND FILMS
衬底表面预处理对金刚石薄膜形核及长大的影响

Diamond films were synthesized on TC4 Ti alloy and Si(001)substrates bycombustion flame method in the atmosphere.The films obtained were characterized by scanningelectron microscopy and laser Raman spectroscopy.The results indicated that the structure andmorphology of diamond films depend strongly on the substrate temperature,the ratio of O_2 toC_2H_2 gas flow rates,nature of substrate and depositing location.The effects of substrate surfacepretreatment on nucleation and growth behavior of diamond films were studied.The nucleationdensity of the diamond crystallites is enhanced when substrate is scratched by diamond grit andcoated with mechanical pump oil.On chemically etched substrate,the nucleation and growth ofdiamond is very uniform.Nucleation is favored on prominent features of the substrate,for ex-ample,scratch and crystal boundary.