THE CRYSTALLINE PROPERTY CHANGES OF a-WOx FILMS CAUSED BY ELECTROCHROMIC REACTION PROCESS
a—WOx薄膜电致变色反应中的结晶性能

The crystalline property of reaction sputtering deposition WOx films, caused by electrochromic reaction, are studied with XRD and STM techniques. The XRD results indict that electrochromic reaction makes the as-deposited a-WOx film amorphous property redu