STRUCTURE OF Sb AND Pb FILMS DEPOSITED BY IONIZED CLUSTER BEAM
ICB 淀积 Sb,Pb 的薄膜结构

The paper studies systematically the deposiion at Sb and Pb filmswith an ionized cluster beam set-up.The dependences of the orientationdegree of the grains in the film on the substrate temperature,the ionization cu-rrent and the acceleration voltage are described and the mechanism of filmsformation are disussed.