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材料研究学报 1996
SYNTHESIS AND PROPERTIES OF SUPER-HARD TiB_2 FILM
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Abstract:
Hard TiB2 films have been synthesized by ion beam sputtering. Observation by AFM indicated that the surface of the prepared TiB2 films is very smooth. AES, XRD and XPS analysis showed that the B: Ti ratio in the films is 1.8, the formed films are pricipally crystalline TiB2 with a hexagonal structure and exhibit a strong (101) preferred orientation. The ultra micro-indentation tests revealed that the deposited TiB2 films have a very high hardness of about 48 GPa.
