PREPARATION SUPERFINE POWDER BY VACUUM ARC PLASMA JET EVAPORATION METHOD
真空电弧等离子射流蒸发法沉积超微粉

The device preparing superfine powder was designed and installed in LPPS.The superfine powders,such as Fe,Si,Ni,Mo,TiAl,Ti_3Al and Si_3N_4,were obtained by vac-uum arc plasma jet evaporation method.The size of the superfine powders are about 5,10,20 and 50nm respectively,which was controlled by vacuum chamber pressure and electriccurrent of the P.J gun.Shape and distribution of the particles were observed.The deposi-tion rate of the superfine powder was examined.