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材料研究学报 1991
VACUUM Co-EVAPORATED DEPOSITION FOR CuInSe_2 THIN FILM BY THREE-SOURCES PROCESS
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Abstract:
Thin films of CuInSe_2 have been co-evaporated in vacuum bythree-sources process.The compositions of the films have been controlled by ratio of theelements in the three sources and temperature of the three sources.Satisfactary compositionand single chalcopyrite structure have been obtained.It has been found that treatment isnecessary for forming single chalcopyrite phase.The composition,structure,optical andelectrical properties of evaporated CuInSe_2 thin films have been disscussed in relation topreparation conditions.