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OALib Journal期刊
ISSN: 2333-9721
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MACHINE COMPLIANCE EFFECT OF THE NANOINDENTER AND ITS MODIFICATION ON THE HARDNESS AND ELASTIC MODULUS MEASUREMENT
纳米压入法的柔度效应及其校正

Keywords: nano-indentation micro-hardness elastic modulus
纳米压入
,显微硬度,弹性模量,薄膜测量

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Abstract:

The effeCt of machine compliance on the hardness and elastic modulus was studied using the YY-I indentation tester.It is evident that the machine compliance mainly influences the slope of the unloading curve,and must be subtracted in the test.This is particularly true when calculating the elastic modulus and hardness distribution with only one load-displacement indentation curve.

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