THE PROPERTIES OF Al_2O_3 HUMIDITY-SENSING THIN FILM PREPARED BY SOL-GEL METHOD
溶胶—凝胶法制备的Al2O3感湿膜及其性质

Using sol-gel method. Al2O3 thin film have ben prepared on Al wafer with electrophoretic technique. The principal parts of the films are non-crystalline solid.and there are a little small crystallites in the films.The amount of crystallites increases with