Growth of AlGaN Epitaxial Film with High Al Content by Metalorganic Chemical Vapour Deposition
Growth of AlGaN Epitaxial Film with Chemical Vapour High A1 Content by Metalorganic Deposition

A high-Al-content AlGaN epilayer is grown on a low-temperature-deposited AlN buffer on (0001) sapphire by low pressure metalorganic chemical vapour deposition. The dependence of surface roughness, tilted mosaicity, and twisted mosaicity on the conditions of the AlGaN epilayer deposition is evaluated. An AlGaN epilayer with favourable surface morphology and crystal quality is deposited on a 20nm low-temperature-deposited AlN buffer at a low V/III flow ratio of 783 and at a low reactor pressure of 100Torr, and the adduct reaction between trimethylaluminium and NH3 is considered.