Structural Design and Testing of Silicon-Based PZT Thin Film Micro-Sensors
硅基PZT压电薄膜微传感器的结构设计和实验研究

The structural and territorial design of PZT thin film micro-sensors is processed.Using MEMS processes and standard silicon-based IC,the key techniques and technical conditions are obtained for PZT thin film micro-cantilever beams based on silicon.At the same time,the preparation and micro-pattern etching techniques of PZT thin films are investigated by experiment.Finally,a PZT thin film micro-sensor is successfully etched and the experimental foundations are laid for the research and development of the system on a chip.