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半导体学报 2008
Field Emission from a Mixture of Amorphous Carbon and Carbon Nanotubes Films
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Abstract:
A mixture of amorphous carbon and carbon nanotubes films was synthesized on stainless steel plates by a microwave plasma enhanced chemical vapor deposition system.The source gases were hydrogen and methane with flow rates of 100 and 16sccm,respectively,with a total pressure of 5.0kPa.The surface morphology and the structure of the films were characterized by field emission scanning electron microscopy(SEM)and Raman scattering spectroscopy.Field emission properties of as-deposited film were measured in a vac...