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半导体学报 2007
Design and Mechanical Characteristics of Novel MEMS Microneedles
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Abstract:
Three novel MEMS microneedles are designed and fabricated.Aiming at practical applications,the mechanical characteristics of the microneedles and process of fluid flowing through the microchannels are studied through both theoretical analysis and numerical simulation with the finite element method.The results show that the microneedles designed here are strong enough to guarantee safe injection through skin,and they are suitable for delivering drugs in micro-volumes.
