|
半导体学报 2008
Effect of Pretreatment of Cleaved Edges on Overgrowth
|
Abstract:
Site-controlled InAs quantum wires were fabricated with the cleaved edge overgrowth method.First,AlGaAs/GaAs superlattices were grown on GaAs substrate by molecular beam epitaxy.Then,the sample was taken out of the MBE system and cleaved along the 110] direction.After pretreatment,the(110)cleaved edges acted as a nanopattern in overgrowth.Experimental results demonstrate that the pretreatment on the cleaved edge affects the overgrowth and that selective etching is better than natural oxidation for site-con...