OPC Reuse Based on a Reduced Standard Cell Library
基于精简标准单元库的OPC复用技术

This paper presents a method for reusing the results of standard-cell-based OPCs.For this purpose,a reduced standard cell library composed of an inverter and MUX2 is constructed to realize the core logic of a traditional standard cell library.This library is manufacturing-friendly,and the reuse of its OPC results can improve the efficiency of chip manufacturing greatly and highly reduce the need for large storage.The electrical simulation results of the library also show that its increase in area,delay,and power is minor compared with traditional standard cell libraries.