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半导体学报 2004
Influence of Carrier Diffusion on Modulation Transfer Function of Charge Coupled Devices
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Abstract:
The mechanism of carrier diffusion in a charge coupled device is discussed using surface channel and front illumination as example.A method is presented for calculating the modulation transfer function (MTF) of CCD by using the total signal charge collected during a period of illumination.The MTF curve is obtained when the depletion width varies with the signal charge density.That carrier diffusion effected on the modulation transfer function is analyzed.The experiments are done by using the measuring setup of MTF,and the numerical simulating results fit with the experimental results.