Transmission Lines Embedded in Silicon Oxide Layers on Silicon Wafers
基于硅氧化层的嵌入式传输线制造

Transmission lines,microstrips and coplanar waveguides,are fabricated on lossy silicon substrates embedded in CMOS Cu/SiO2 interconnect layers.The impedance,loss,and slowing factor are studied in detail as they relate to the geometric size of the transmission lines.We show that microstrips and coplanar waveguides embedded in silicon oxide can be achieved with low loss on lossy silicon wafers,providing the essential passive components for designing microwave and millimetre-wave circuits on silicon wafers.