MOCVD Growth of Self-Arranged ZnO Nanosize Islands
ZnO纳米岛的MOCVD自组装生长

Well ordered ZnO islands are successfully grown on Al 2O 3 (0001) substrates by using the metal organic chemical vapor deposition in a suitable condition.Increasing growth time is found to increase the density and grain size of the ZnO nanosize islands.High growth temperature leads it difficult for ZnO islands to nuclear on the sapphire surface.Compared with the ZnO film,the blue shift of the band edge emission is observed in the room temperature PL spectra,together with a broad green emission near the band edge which possibly resulting from the surface state or defect of ZnO islands.This study indicates that proper growth conditions such as growth time and temperature are some of the determined factors to grow high quality ZnO nanosize islands.