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半导体学报 2001
a-Si TFT/PIN Coupled-Pair Sensors
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Abstract:
The effect of a- Si TFT and a- Si PIN diode performance on a- Si TFT/ PIN coupled pairs of active addressing image sensors array has been studied by simulation and experim ent.High switch ratio a- Si TFT and high photosensitivity of a- Si PIN diodes have been obtained.The photo- converted ratio of a- Si PIN is about 18.1n A / lx.The good linear relationship between the photo- current and the illuminated intensity has been obtained in the a- Si TFT/ PIN im age sensors.
