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半导体学报 2002
Hierarchical h-Adaptive Computation in VLSI 3-D Capacitance Extraction
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Abstract:
The auto-refinement scheme of the boundary elem en ts in the hierarchical h-adaptive computation is enhanced to improve the reliab ility.In addition,the superconvergent recovery technology is employed in the 3- D parasitic capacitance adaptive computation where the hierarchical cone functio ns is added into the constant boundary elements.A method using the recovery tech nology in the regions with different orders elements is presented.Compared with other similar software,this adaptive computation is faster-speed and more stab le.