Investigation on Coplanar Stripline on Silicon Substrate and Its Application
硅衬底上共面线的特性及应用

The characteristic of coplanar stripline in deep-submicron CMOS integrated circ uits is studied based on theoretictal analysis and measured results.Distributed parameter extraction methods for transmission lines on silicon substrate are pro posed and design guidelines to minimize the loss of coplanar striplines are also given.Finally,the coplanar stripline on-chip is successfully used in the desig n of the high-speed IC's,and some measured results are also given.The measured results indicate that inductance can be implemented using coplanar striplines in deep-submicron CMOS high-speed IC's.