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半导体学报 2002
A Novel Compact-Structure Arrayed-Waveguide Grating Device
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Abstract:
Arrayed waveguide grating (AWG) device,a novel compact structure,is presented based on silicon on insulator (SOI) material.A total internal reflection (TIR) waveguide mirror is fabricated at the middle of each arrayed waveguide.An approach of compensating TE TM mode polarization is presented by using the phase difference,which is caused by TIR at the waveguide mirror.This AWG device has advantage for its small size and simple technigue of fabrication.The experimental results are given and the feasibility of fabrication is tested.