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半导体学报 2001
A New Simulated Charges Method to Calculate Interconnect Capacitance with Two Kinds of Media
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Abstract:
A new simulated charges method,which combines the method of mirror Green's function and optimizes the simulated charges with DFP method,is used to extract the capacitance parameter of ULSI interconnection with two kinds of media.Compared with the results from other simulation of interconnect capacitance.The relative deviation is within 10%,which shows that this new method is efficient and feasible.
