|
半导体学报 2001
The Recent Progress of On-Chip Optical Interconnects for Integrated Circuits
|
Abstract:
The limitations of conventional metallization interconnects of integrated circuits and the potential solution of the on chip optical interconnect are discussed.The recent progress of the three basic optical interconnect devices (light emitter,photo receiver and optical waveguide) and their integration with silicon ICs are overviewed and reviewed.Finally,the prospect of on chip optical interconnects on integrated circuits is appraised.