Large-Signal Macromodel for Equivalent Circuits Representation of Comb Resonator
梳状谐振器的大信号等效电路宏模型

The electromechanical characteristic equations of the comb resonator are studied.With the introduction of polynomial controlled sources,the large-signal equivalent circuits with F-I analogy method are presented ,system-level simulation is then carried out for the macromodel with SPICE software and two methods are adopted to verify the macromodel.