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半导体学报 2004
Optimization and Design of RF Inductors on SOI
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Abstract:
The characteristics of SOI RF inductors are compared to those of bulk RF inductors.The simulating results of the RF inductors on SOI are presented,and the effects on the inductance,quality factor,and self-resonant-frequency brought by the change of the inductor parameters are analyzed.Finally,some design and optimization principles of RF inductors based on SOI are suggested according to these results and analysis.The comparing way in this paper,which is based on same inductance is different from before.
