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半导体学报 1991
Raman Spectra Investigation on Ge/Si Superlattices
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Abstract:
We have observed the folded longitudinal acoustical phonons (FLA) of Ge/Si superlat-tices. The existence of the FLA indicates that the samples studied are of the superlattice stru-cture.By comparing the observed frequencies of FLA with the calculated ones, we come tothe conclusion that the nominal values of the structrue parameters for the samples used areapproximately consistent with the actual ones.The distribution of the strain in sample R3is estimated from the observed frequency shifts of confined optical phonons.