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半导体学报 1989
Optical Characteristic Analysis of MOS-type Waveguides
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Abstract:
The effect of the metal clad layer on the optical characteristics in the MOS-type wave-guide is analyzed, and the approximate expressions are given for calculating the propagationconstant and absorption loss coefficient of TE mode.In order to eliminate the mode lossescaused by the metal clad layer, the method for selecting the necessary thickness of the oxidebuffer layer is presented and discussed.