Studies on Application and the Strategy of Improved Dual-loop Control
改进型双环控制策略及其应用研究

On the basis of analyzing the physical characteristics of nonameter drive parts and the control characteristics of master-slave loops, mathematical models of nonameter drive parts with big feeding force were set up, the improved dual-loop control strategy based on optimization methods of the master loop and slave loop was presented to ensure system robustness and nanometer control precision. At last, the results of simulations and experiments show that high control precision about 10 nm can be gotten by using the control strategy proposed in this paper when the feeding force is 5000N.