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Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1Ti03 Thin Films
Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

Keywords: spectroscopic ellipsometry,optical constant spectra,BST films
椭偏光谱
,光学常数谱,BST薄膜,陶瓷薄膜,光学性质

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Abstract:

Ellipsometric spectra of Ba0.9Sr0.1TiO3 (BST) thin films with various annealing temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient k) spectra and band gap Eg were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n, the extinction coefficient k and the band gap Eg with annealing temperatures.

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