Fabrication of Zinc Oxide Thin Films by Magnetron Sputtering Based on Opal Template and its Optical Properties
基于欧珀模板磁控溅射生长氧化锌薄膜及其光学特性

By using polystyrene opal template as substrate, zinc oxide film samples were prepared by a magnetron sputtering process. The structure and optical properties of the fabricated samples were analyzed by FTIR, XRD, UV-VIS and PL spectra. The results of SEM analysis show that the PS template has a multi-layer structure consisting of periodically hexagonal array of polystyrene spheres in three dimensions and the zinc oxide film has a surface morphology arrayed by ZnO hollow hemispheres like nanobowls with high smooth and density. These imply that zinc oxide can be deposited on the template without destroying the structure of polystyrene opal template during sputtering process. Therefore the zinc oxide produced by magnetron sputtering duplicates the surface structure of the opal template. PL spectra show that the photoluminescence intensity of the composite of zinc oxide and opal template is 4 5 times stronger than that of the template removed zinc oxide film.