Growth Behavior of CVD Diamond Films Promoted by Nanosized
金刚石纳米粉促进的CVD金刚石薄膜的生长行为研究

The nanosized diamond powder, synthesized by explosive detonation was used asthe coating material on substrates for the purpose of promoting the nucleation and growth ofCVD diamond films. Experiments show that in comparison with the scratching pretreatmentwith -um diamond particles, the nanosized diamond coating pretreatment not only can makenucleation density higher and more homogeneous, but shorten the growth time for the formationof a continuous film. The growth process of the films is composed of sequential two stages. Thefirst is the growth and association of sphere shaped particles before the appearance of any facet,the second is the gradual emergence of facets and the growth of the crystalline grain with certainfacets. The films made by this pretreatment possess the following outstanding properties, such ascompact structure, low surface roughness, fine facets and high crystalline quality. In contrast, once the films deposited on the scratched substrate are nucleated, the certain facets emerge without the former stage mentioned above, but there exist significant second nucleation on them.