|
无机材料学报 2002
Influences of Heat Treatment on the Structure of PMNT Thin Films Derived by Sol-Gel Process
|
Abstract:
PMNT (Lead Magnesium Niobate Titanate) thin films with preferred orientation were deposited on Pt/TiO2/SiO2/Si substrate by a sol-gel process. The influence of the technological process on morphology, crystallization and orientation of films were investigated by XRD(X Ray Diffraction) and SPM(Scan Probe Microscope). The optimum process for preparing PMNT thin film with high orientation was established.