Preparation of Hydro-oleophobic Silica Antireflective Coating
疏水疏油二氧化硅增透膜的制备

Using tetraethoxylsilane as precursor, ammonia as catalyst, the hydro-oleophobic antireflective coating was prepared by sol-gel process along with fluoroalkylsilane self-assembly. The properties of the coatings were characterized with spectrophotometer, scanning probe microscope, spectroscopic ellipsometry, contact angle measurement and oil-resistant test. The results indicate that the peak transmittance of the hydro-oleophobic coatings is 99.8%, water contact angle is 118.0°, and polydimethyl siloxane oil angle is 74.5°. The oil-resistant test shows that the oil-resistant ability of the hydro-oleophobic silica antireflective coating is considerably improved compared with that of the common silica antireflective coating.