Effects of thermal evaporation and electron beam evaporation on two-dimensional patterned Ag nanostructure during nanosphere lithography
电阻热蒸发镀膜与电子束蒸发镀膜对纳米球刻蚀方法制备二维银纳米阵列结构的影响

In the process of fabricating two-dimensional Ag nano-arrays via nanosphere lithography, different deposition methods present different lattice point shapes of Ag nanostructure. Nano-triangles are produced by thermal evaporation whereas nano-rings are obtained by electron beam evaporation although they are both of hexagonal lattice. It is indicated that the sizes, the surface nanocurvature, the thermal and the kinetic energies of the particles deposited are key factors controlling the formation of the shape of Ag lattice point.