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物理学报 2011
Influence of RF power on the structure and properties of glow discharge polymer
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Abstract:
Using trans-2-butene and hydrogen as the precursor, the glow discharge polymer films was successfully coated on KBr discs by glow discharge polymerization at different powers. The chemical structure, thermal stability of the GDP films and the deposition rate of GDP films were characterized by the FT-IR, TG and surface profiler technology. The Results show that the deposition rate, the olefinic structure, the ratio of C/H, and the content of C C in GDP films increase with the RF power increasing. The thermal stability of GDP films fabricated at higher RF power is better.